Electrical and optical properties of AlNxOy thin films deposited by reactive DC magnetron sputtering

Resumo e poster

Bibliographic Details
Main Author: Borges, Joel Nuno Pinto (author)
Other Authors: Martin, Nicolas (author), Barradas, Nuno (author), Alves, Eduardo (author), Eyidi, Dominique (author), Beaufort, Marie France (author), Girardeau, Thierry (author), Paumier, Fabien (author), Vaz, F. (author), Marques, L. (author)
Format: conferencePoster
Language:eng
Published: 2012
Subjects:
AlNxOy
Electrical and optical properties
Online Access:http://hdl.handle.net/1822/20501
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/20501

Internet

http://hdl.handle.net/1822/20501

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