Tantalum oxynitride thin films: mechanical properties and wear behavior dependence on growth conditions

Tantalum oxynitride (TaNxOy) thin films were produced by magnetron sputtering. This work analyzes and compares the mechanical properties and the wear behavior of the films, taking into account the differences promoted by changes in composition and structure, caused by the variation of the partial pr...

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Bibliographic Details
Main Author: Cristea, D. (author)
Other Authors: Crisan, A. (author), Munteanua, D. (author), Apreutesei, M. (author), Costa, Manuel F. M. (author), Cunha, L. (author)
Format: article
Language:eng
Published: 2014
Subjects:
Coatings
Tantalum oxynitride thin films
Tantalum oxynitride
Wear behavior
Adhesion
Hardness
Young's modulus
Ciências Naturais::Ciências Físicas
Science & Technology
Online Access:http://hdl.handle.net/1822/37472
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/37472

Internet

http://hdl.handle.net/1822/37472

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