Tantalum oxynitride thin films: mechanical properties and wear behavior dependence on growth conditions
Tantalum oxynitride (TaNxOy) thin films were produced by magnetron sputtering. This work analyzes and compares the mechanical properties and the wear behavior of the films, taking into account the differences promoted by changes in composition and structure, caused by the variation of the partial pr...
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| Outros Autores: | , , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2014
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/37472 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/37472 |