Measurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflow

This paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays wer...

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Bibliographic Details
Main Author: Maciel, Marino Jesus Correia (author)
Other Authors: Rocha, Rui Pedro Leitão Silva (author), Carmo, João Paulo Pereira (author), Correia, J. H. (author)
Format: article
Language:eng
Published: 2014
Subjects:
Measurement
Statistic analysis
Reproducibility validation
Microlenses fabrication
Science & Technology
Online Access:http://hdl.handle.net/1822/71703
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/71703

Internet

http://hdl.handle.net/1822/71703

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