Measurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflow
This paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays wer...
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| Outros Autores: | , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2014
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/71703 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/71703 |