APA (7th ed.) Citation

Cerqueira, M. F., Andritschky, M., Rebouta, L., Ferreira, J. A., & Silva, M. F. (1995). Microcrystalline silicon thin films prepared by RF reactive magnetron sputter deposition.

Chicago Style (17th ed.) Citation

Cerqueira, M. F., M. Andritschky, L. Rebouta, J. A. Ferreira, and M. F. Silva. Microcrystalline Silicon Thin Films Prepared by RF Reactive Magnetron Sputter Deposition. 1995.

MLA (8th ed.) Citation

Cerqueira, M. F., et al. Microcrystalline Silicon Thin Films Prepared by RF Reactive Magnetron Sputter Deposition. 1995.