Piezoresistive silicon thin film sensor array for biomedical applications

N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor −28, were deposited on rugged and flexible polyimide foils by Hot-wire chemical vapor deposition using a tantalum filament heated to 1750 °C. The piezoresistive response under cyclic quasi-static and dynamical (u...

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Bibliographic Details
Main Author: Alpuim, P. (author)
Other Authors: Correia, Vítor (author), Marins, Emílio Sérgio (author), Rocha, J. G. (author), Trindade, Isabel (author), Lanceros-Méndez, S. (author)
Format: article
Language:eng
Published: 2011
Subjects:
Hot-wire CVD
Nanocrystalline silicon
Thin films
Piezoresistance
Flexible electronics
Sensors
Science & Technology
Online Access:http://hdl.handle.net/1822/11847
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/11847

Internet

http://hdl.handle.net/1822/11847

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