Piezoresistive silicon thin film sensor array for biomedical applications
N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor −28, were deposited on rugged and flexible polyimide foils by Hot-wire chemical vapor deposition using a tantalum filament heated to 1750 °C. The piezoresistive response under cyclic quasi-static and dynamical (u...
| Autor principal: | |
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| Outros Autores: | , , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2011
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/11847 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/11847 |