Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operat...
| Autor principal: | |
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| Outros Autores: | , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2011
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/14654 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/14654 |