Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operat...

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Bibliographic Details
Main Author: Rocha, Luís A. (author)
Other Authors: Dias, R. A. (author), Cretu, E. (author), Mol, L. (author), Wolffenbuttel, R. F. (author)
Format: article
Language:eng
Published: 2011
Subjects:
Microsystems
Auto-calibration
Science & Technology
Online Access:http://hdl.handle.net/1822/14654
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/14654

Internet

http://hdl.handle.net/1822/14654

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