Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings

In this work (Ti,Si,Al)N films were deposited using only rf or a combination of rf and d.c. reactive magnetron sputtering. Chemical composition, thickness, film structure and mechanical properties of the films were investigated by means of Rutherford backscattering (RBS), electron microprobe analysi...

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Bibliographic Details
Main Author: Carvalho, S. (author)
Other Authors: Rebouta, L. (author), Cavaleiro, A. (author), Rocha, L. A. (author), Gomes, J. (author), Alves, E. (author)
Format: article
Language:eng
Published: 2001
Subjects:
Nanocomposites
Superhard coatings
Ti-Si-Al-N
Microstructure
Thermal stability
Wear coefficient
Online Access:http://hdl.handle.net/10316/4291
Country:Portugal
Oai:oai:estudogeral.sib.uc.pt:10316/4291

Internet

http://hdl.handle.net/10316/4291

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