Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings
In this work (Ti,Si,Al)N films were deposited using only rf or a combination of rf and d.c. reactive magnetron sputtering. Chemical composition, thickness, film structure and mechanical properties of the films were investigated by means of Rutherford backscattering (RBS), electron microprobe analysi...
| Autor principal: | |
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| Outros Autores: | , , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2001
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/10316/4291 |
| País: | Portugal |
| Oai: | oai:estudogeral.sib.uc.pt:10316/4291 |