A high performance scintillator-silicon-well x-ray microdetector based on DRIE techniques
This paper proposes a X-rays detector based on an array of scintillator crystals, CsI:Tl, encapsulated in a well that is etched into a silicon substrate by deep reactive ion etching. The X-ray energy is first converted to visible light which is detected by a photodetector in the well bottom. DRIE te...
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| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2001
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| Texto completo: | http://hdl.handle.net/1822/2151 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/2151 |