Closed loop operation of time-based accelerometers

In this paper we present a method for closed-loop operation of pull-in time accelerometers. Accelerometers based on the measurement of the pull-in time of movable parallel-plates MEMS structures have already demonstrated very good resolution capabilities, with low requirements on the capacitive read...

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Bibliographic Details
Main Author: Dias, Rosana A. (author)
Other Authors: Wolffenbuttel, R. F. (author), Cretu, E. (author), Rocha, Luís A. (author)
Format: conferencePaper
Language:eng
Published: 2012
Subjects:
Pull-In
Accelerometer
Closed-loop
Electrostatic actuation
Online Access:http://hdl.handle.net/1822/21888
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/21888

Internet

http://hdl.handle.net/1822/21888

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