Nanocomposite Ag:TiN thin films for dry biopotential electrodes
Silver-added titanium nitride (Ag:TiN) thin films were deposited by DC reactive sputtering with Ag contents ranging from 0 to ∼50 at.% on silicon and glass substrates, aiming at studying their potential application as bio-electrodes. The coatings were characterised regarding their composition, morph...
Main Author: | |
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Other Authors: | , , , , , , , |
Format: | article |
Language: | eng |
Published: |
2013
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Subjects: | |
Online Access: | http://hdl.handle.net/10316/27424 |
Country: | Portugal |
Oai: | oai:estudogeral.sib.uc.pt:10316/27424 |