Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results revea...
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| Outros Autores: | , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2002
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/3016 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/3016 |
| Resumo: | This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequency |
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