Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge

This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results revea...

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Bibliographic Details
Main Author: Marques, L. (author)
Other Authors: Jolly, Jacques (author), Gousset, G. (author), Alves, L. L. (author)
Format: article
Language:eng
Published: 2002
Subjects:
Capacitively coupled discharge
Hydrogen plasma
Online Access:http://hdl.handle.net/1822/3016
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/3016

Internet

http://hdl.handle.net/1822/3016

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