Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen

This work presents modeling and experimental results for the electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen. A two-dimensional, time-dependent fluid model is used to describe the dynamics of electrons and positive ions H+, H2+, and H3+at different frequenc...

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Bibliographic Details
Main Author: Marques, L. (author)
Other Authors: Jolly, Jacques (author), Alves, L. L. (author)
Format: article
Language:eng
Published: 2007
Subjects:
Plasma-enhanced chemical vapor deposition (PECVD)
Radio-frequency glow discharge (RFGD)
hydrogen
scaling laws
Science & Technology
Online Access:http://hdl.handle.net/1822/6530
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/6530

Internet

http://hdl.handle.net/1822/6530

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