Structural properties of Ge nano-crystals embedded in SiO2 films from X-ray diffraction and Raman spectroscopy
SiO2 films containing small particles of Ge were grown using the r.f.-magnetron sputtering technique. The films were studied by means of X-ray diffraction (XRD) and Raman spectroscopy. XRD studies revealed diamond structure of Ge particles in the films grown at temperatures higher than 500ºC. The de...
Autor principal: | |
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Outros Autores: | , , |
Formato: | article |
Idioma: | eng |
Publicado em: |
1998
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Assuntos: | |
Texto completo: | http://hdl.handle.net/1822/14279 |
País: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/14279 |