Structural properties of Ge nano-crystals embedded in SiO2 films from X-ray diffraction and Raman spectroscopy

SiO2 films containing small particles of Ge were grown using the r.f.-magnetron sputtering technique. The films were studied by means of X-ray diffraction (XRD) and Raman spectroscopy. XRD studies revealed diamond structure of Ge particles in the films grown at temperatures higher than 500ºC. The de...

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Bibliographic Details
Main Author: Rolo, Anabela G. (author)
Other Authors: Vasilevskiy, Mikhail (author), Conde, O. (author), Gomes, M. J. M. (author)
Format: article
Language:eng
Published: 1998
Subjects:
Online Access:http://hdl.handle.net/1822/14279
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/14279