Cylindrical spinning rotor gauge — A new approach for vacuum measurement

The spinning rotor gauge (SRG) is one of the most interesting vacuum gauges ever made, covering a pressure range of over seven orders of magnitude, with minimal gas interference (no pumping, ionization or heating of the measured gas), and a great stability of less than 1% drift per year. But despite...

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Detalhes bibliográficos
Autor principal: Almeida, Pedro Gonçalo Dias de (author)
Formato: masterThesis
Idioma:eng
Publicado em: 2015
Assuntos:
Texto completo:http://hdl.handle.net/10362/15999
País:Portugal
Oai:oai:run.unl.pt:10362/15999