Cylindrical spinning rotor gauge — A new approach for vacuum measurement
The spinning rotor gauge (SRG) is one of the most interesting vacuum gauges ever made, covering a pressure range of over seven orders of magnitude, with minimal gas interference (no pumping, ionization or heating of the measured gas), and a great stability of less than 1% drift per year. But despite...
Autor principal: | |
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Formato: | masterThesis |
Idioma: | eng |
Publicado em: |
2015
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Assuntos: | |
Texto completo: | http://hdl.handle.net/10362/15999 |
País: | Portugal |
Oai: | oai:run.unl.pt:10362/15999 |