Closed-loop operated time-based accelerometer

A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-...

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Bibliographic Details
Main Author: Dias, Rosana A. (author)
Other Authors: Macedo, Pedro (author), Silva, Hélder D. (author), Wolffenbuttel, R. F. (author), Cretu, E. (author), Rocha, Luís A. (author)
Format: conferencePaper
Language:eng
Published: 2012
Subjects:
Closed-loop MEMS accelerometer
Pull-in accelerometer
Science & Technology
Online Access:http://hdl.handle.net/1822/21376
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/21376

Internet

http://hdl.handle.net/1822/21376

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