A microinjected 3-axis thermal accelerometer

A completely new approach for the fabrication of 3-axis thermal accelerometers is presented in this paper. Micromolded polystyrene micro-parts are assembled with polyimide membranes enabling the construction of thermal accelerometers. The use of polymers (polystyrene and polyimide) with low thermal...

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Bibliographic Details
Main Author: Rocha, Luís A. (author)
Other Authors: Silva, C. S. (author), Cerqueira, M. F. (author), Ribeiro, J. F. (author), Gonçalves, L. M. (author), Pontes, A. J. (author), Viana, J. C. (author)
Format: conferencePaper
Language:eng
Published: 2011
Subjects:
Thermal accelerometer
Microsensors
Polymer microtechnologies
Microinjection
Science & Technology
Online Access:http://hdl.handle.net/1822/14687
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/14687

Internet

http://hdl.handle.net/1822/14687

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