Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings

The authors are grateful to the Portuguese Foundation of Science and Technology through fellowship SFRH/BPD/102217/2014 for financial support of this research.

Bibliographic Details
Main Author:	Fernandes, M. (author)
Other Authors:	Vygranenko, Y. (author), Vieira, Maria Manuela de Almeida Carvalho (author), Lavareda, G. (author), Carvalho, C. Nunes De (author), Amaral, A. (author)
Format:	conferenceObject
Language:	eng
Published:	2018
Subjects:	deposition technique thin solid films transparent conducting oxides Energy(all)
Online Access:	https://doi.org/10.1016/j.egypro.2016.11.323
Country:	Portugal
Oai:	oai:run.unl.pt:10362/42055

Description
Summary:	The authors are grateful to the Portuguese Foundation of Science and Technology through fellowship SFRH/BPD/102217/2014 for financial support of this research.