Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings

The authors are grateful to the Portuguese Foundation of Science and Technology through fellowship SFRH/BPD/102217/2014 for financial support of this research.

Detalhes bibliográficos
Autor principal: Fernandes, M. (author)
Outros Autores: Vygranenko, Y. (author), Vieira, Maria Manuela de Almeida Carvalho (author), Lavareda, G. (author), Carvalho, C. Nunes De (author), Amaral, A. (author)
Formato: conferenceObject
Idioma:eng
Publicado em: 2018
Assuntos:
deposition technique
thin solid films
transparent conducting oxides
Energy(all)
Texto completo:https://doi.org/10.1016/j.egypro.2016.11.323
País:Portugal
Oai:oai:run.unl.pt:10362/42055

Texto Completo

https://doi.org/10.1016/j.egypro.2016.11.323

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