Cristea, D., Constantin, D. G., Crisan, A., Abreu, C. S., Gomes, J. R., Barradas, N. P., . . . Cunha, L. (2013). Properties of tantalum oxynitride thin films produced by magnetron sputtering: The influence of processing parameters.
Chicago Style (17th ed.) CitationCristea, D., et al. Properties of Tantalum Oxynitride Thin Films Produced by Magnetron Sputtering: The Influence of Processing Parameters. 2013.
MLA (8th ed.) CitationCristea, D., et al. Properties of Tantalum Oxynitride Thin Films Produced by Magnetron Sputtering: The Influence of Processing Parameters. 2013.
Warning: These citations may not always be 100% accurate.