Effect of Composition on the Physical Properties at Nanoscale of PZT Thin Films
PbZr1-xTixO3 (PZT) thin films (x = 0.46, 0.47, 0.48, 0.49, and 0.50) were deposited on Pt/TiO2/SiO2/Si substrates using a polymeric chemical method to study the effects of the composition on the macroscopic electrical and local piezoelectric properties. Both measurements demonstrate the existence of...
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Other Authors: | , , |
Format: | article |
Language: | eng |
Published: |
1000
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Subjects: | |
Online Access: | http://hdl.handle.net/10773/20477 |
Country: | Portugal |
Oai: | oai:ria.ua.pt:10773/20477 |