Raman spectra and structural analysis in ZrOxNy thin films

Raman spectroscopy has been used as a local probe to characterize the structural evolution of magnetron-sputtered decorative zirconium oxynitride ZrOxNy films which result from an increase of reactive gas flow in the deposition The lines shapes, the frequency position and widths of the Raman bands s...

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Bibliographic Details
Main Author: Moura, C. (author)
Other Authors: Carvalho, P. (author), Vaz, F. (author), Cunha, L. (author), Alves, E. (author)
Format: article
Language:eng
Published: 2006
Subjects:
Sputtering
Zirconium oxynitride
Raman
X-ray diffraction
Decorative coatings
Science & Technology
Online Access:http://hdl.handle.net/1822/5763
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/5763

Internet

http://hdl.handle.net/1822/5763

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