Raman spectra and structural analysis in ZrOxNy thin films

Raman spectroscopy has been used as a local probe to characterize the structural evolution of magnetron-sputtered decorative zirconium oxynitride ZrOxNy films which result from an increase of reactive gas flow in the deposition The lines shapes, the frequency position and widths of the Raman bands s...

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Detalhes bibliográficos
Autor principal: Moura, C. (author)
Outros Autores: Carvalho, P. (author), Vaz, F. (author), Cunha, L. (author), Alves, E. (author)
Formato: article
Idioma:eng
Publicado em: 2006
Assuntos:
Texto completo:http://hdl.handle.net/1822/5763
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/5763