Influence of Al(Er) interlayer on the mechanical properties of AlN(Er) coatings
AlN(Er) thin films were deposited by sputtering on M2 steel (AISI) and Si substrates with different thickness of an Al(Er) interlayer. No significant variations were observed in the chemical composition and structure of the AlN(Er) films. The films in all cases presented excess nitrogen in relation...
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| Outros Autores: | , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2002
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/10316/4285 |
| País: | Portugal |
| Oai: | oai:estudogeral.sib.uc.pt:10316/4285 |