Effects of the morphology and structure on the elastic behavior of (Ti,Si,Al)N nanocomposites
(Ti,Si,Al)N nanocomposite coatings with different Ti, Si, Al contents, were deposited onto silicon and polished high-speed steel substrates, by r.f. and/or d.c. reactive magnetron sputtering. The stoichiometry of the films was investigated by electron probe microanalysis and Rutherford backscatterin...
| Autor principal: | |
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| Outros Autores: | , , , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2003
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/10316/4269 |
| País: | Portugal |
| Oai: | oai:estudogeral.sib.uc.pt:10316/4269 |