Effects of the morphology and structure on the elastic behavior of (Ti,Si,Al)N nanocomposites

(Ti,Si,Al)N nanocomposite coatings with different Ti, Si, Al contents, were deposited onto silicon and polished high-speed steel substrates, by r.f. and/or d.c. reactive magnetron sputtering. The stoichiometry of the films was investigated by electron probe microanalysis and Rutherford backscatterin...

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Bibliographic Details
Main Author: Carvalho, S. (author)
Other Authors: Ribeiro, E. (author), Rebouta, L. (author), Vaz, F. (author), Alves, E. (author), Schneider, D. (author), Cavaleiro, A. (author)
Format: article
Language:eng
Published: 2003
Subjects:
Ti-Si-Al-N
Nanocomposite
Young's modulus
Morphology
Porosity
Online Access:http://hdl.handle.net/10316/4269
Country:Portugal
Oai:oai:estudogeral.sib.uc.pt:10316/4269

Internet

http://hdl.handle.net/10316/4269

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