Tribological behaviour of reactive and co-sputtered W-S-C coatings
W-C-S films were deposited either by a reactive process in an Ar+CH4 atmosphere or by co-sputtering WS2 and C targets. The films were characterized concerning their chemical composition and mechanical properties. The results showed that the films, in both systems, have similar properties. Co-sputter...
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Other Authors: | , |
Format: | article |
Language: | eng |
Published: |
2006
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Subjects: | |
Online Access: | http://scielo.pt/scielo.php?script=sci_arttext&pid=S0870-83122006000100004 |
Country: | Portugal |
Oai: | oai:scielo:S0870-83122006000100004 |