Integrated thin-film rechargeable battery in a thermoelectric scavenging microsystem
Thin-film solid-state rechargeable batteries are ideal power sources for microsystems applications, where a high level of integration is required. The technology and the steps involving the fabrication of such a battery are discussed in this paper. A DC reactive sputtering technique was used in the...
Main Author: | |
---|---|
Other Authors: | , , , |
Format: | conferencePaper |
Language: | eng |
Published: |
2009
|
Subjects: | |
Online Access: | http://hdl.handle.net/1822/17800 |
Country: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/17800 |