Integrated thin-film rechargeable battery in a thermoelectric scavenging microsystem

Thin-film solid-state rechargeable batteries are ideal power sources for microsystems applications, where a high level of integration is required. The technology and the steps involving the fabrication of such a battery are discussed in this paper. A DC reactive sputtering technique was used in the...

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Bibliographic Details
Main Author: Carmo, João Paulo Pereira (author)
Other Authors: Rocha, R. P. (author), Silva, A. F. (author), Gonçalves, L. M. (author), Correia, J. H. (author)
Format: conferencePaper
Language:eng
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/1822/17800
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/17800