Ti–Si–C thin films produced by magnetron sputtering : correlation between physical properties, mechanical properties and tribological behavior

Ti–Si–C thin films were deposited onto silicon, stainless steel and high-speed steel substrates by magnetron sputtering, using different chamber configurations. The composition of the produced films was obtained by Electron Probe Micro-Analysis (EPMA) and the structure by X-ray diffraction (XRD). Th...

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Bibliographic Details
Main Author: Cunha, L. (author)
Other Authors: Vaz, F. (author), Moura, C. (author), Munteanu, D. (author), Ionescu, C. (author), Rivière, J. P. (author), Le Bourhis, E. (author)
Format: article
Language:eng
Published: 2010
Subjects:
Ti–Si–C coatings
Multifunctional coatings
Sputtering
Science & Technology
Online Access:http://hdl.handle.net/1822/13483
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/13483

Internet

http://hdl.handle.net/1822/13483

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