Xray detector based on bulk micromachined photodiode

This paper reports the design, fabrication, assembly and testing of a xray detector based on a bulk micromachined photodiode (BMMPD) with a cavity filled with a scintillating crystal. The xray photons that reach the detector are first converted to visible light by the scintillating crystal. The visi...

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Bibliographic Details
Main Author: Rocha, J. G. (author)
Other Authors: Schabmueller, C. G. J. (author), Ramos, N. F. (author), Lanceros-Méndez, S. (author), Evans, A. G. R. (author), Wolffenbuttel, R. F. (author), Correia, J. H. (author)
Format: conferencePaper
Language:eng
Published: 2002
Subjects:
X-rays
BMMPD
Scintillator
Radiography
Micromachining
Online Access:http://hdl.handle.net/1822/4315
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/4315

Internet

http://hdl.handle.net/1822/4315

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