Microshaping of aluminum-based neural microelectrode arrays using chemical wet-etching

Chemical wet-etching is a standard technique for microelectrode arrays (MEA) fabrication. However its manufacturing reproducibility continues to be hindered by its dependence on several process parameters. Following previous works on aluminum-based MEA fabrication [1], this paper provides the first...

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Bibliographic Details
Main Author: Gonçalves, Sandra Beatriz Tomé (author)
Other Authors: Peixoto, Alexandre Coumiotis Moreira (author), Rodrigues, José Artur Oliveira (author), Ferreira da Silva, Alexandre (author), Correia, J. H. (author)
Format: conferencePaper
Language:eng
Published: 2014
Subjects:
Aluminum
Chemical wet-etching
Invasive neural electrode
Microelectrode array
Microshaping
Science & Technology
Online Access:http://hdl.handle.net/1822/71502
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/71502

Internet

http://hdl.handle.net/1822/71502

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