Double sheaths in RF discharges

This paper analyzes the formation of double spacecharge sheaths, associated to the development of double ionization structures in radio frequency discharges. A simulation tool is used to generate space-time images of the ionization rate in hydrogen and in helium, obtained by inducing artificial modi...

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Detalhes bibliográficos
Autor principal: Marques, L. (author)
Outros Autores: Gousset, G. (author), Alves, L. L. (author)
Formato: article
Idioma:eng
Publicado em: 2005
Assuntos:
Texto completo:http://hdl.handle.net/1822/3014
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/3014