Silver-based reflective coatings for micromachined optical filters

Comunicação apresentada no MME'98, Ulvik, Norway, 3-5 June 1998.

Bibliographic Details
Main Author: Bartek, M. (author)
Other Authors: Correia, J. H. (author), Wolffenbuttel, R. F. (author)
Format: conferencePaper
Language:eng
Published: 1998
Subjects:
Nitride membrane
Silver mirrors
Micromachining
Fabry-Perot interferometer
Online Access:http://hdl.handle.net/1822/4577
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/4577

Internet

http://hdl.handle.net/1822/4577

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