Hollow cathode magnetron deposition of AlN thin films: crystalline structure and morphology
A new dc hollow cathode plasma source has been assembled whith a conventional planar magnetron cathode used together with another plane cathode plate to form a hollow cathode cavity. The system comprises two cathode plates of aluminium separated by a distance d, one of them acting as target of the m...
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| Other Authors: | , , , , |
| Format: | article |
| Language: | eng |
| Published: |
2006
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| Subjects: | |
| Online Access: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300026 |
| Country: | Brazil |
| Oai: | oai:scielo:S0103-97332006000300026 |