Hollow cathode magnetron deposition of AlN thin films: crystalline structure and morphology
A new dc hollow cathode plasma source has been assembled whith a conventional planar magnetron cathode used together with another plane cathode plate to form a hollow cathode cavity. The system comprises two cathode plates of aluminium separated by a distance d, one of them acting as target of the m...
| Autor principal: | |
|---|---|
| Outros Autores: | , , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2006
|
| Assuntos: | |
| Texto completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300026 |
| País: | Brasil |
| Oai: | oai:scielo:S0103-97332006000300026 |