APA (7th ed.) Citation

Pessoa,R. S, Murakami,G., Petraconi,G., Maciel,H. S, Oliveira,I. C, & Grigorov,K. G. (2006). Hollow cathode magnetron deposition of AlN thin films: Crystalline structure and morphology.

Chicago Style (17th ed.) Citation

Pessoa,R. S, Murakami,G, Petraconi,G, Maciel,H. S, Oliveira,I. C, and Grigorov,K. G. Hollow Cathode Magnetron Deposition of AlN Thin Films: Crystalline Structure and Morphology. 2006.

MLA (8th ed.) Citation

Pessoa,R. S, et al. Hollow Cathode Magnetron Deposition of AlN Thin Films: Crystalline Structure and Morphology. 2006.

Warning: These citations may not always be 100% accurate.