Effect of Sputtering Power on the Structural and Optical Properties of Inn Nanodots on Al2O3 by Magnetron Sputtering

In this work, we reported the effects of sputtering power on the structure, optical and electrical properties of InN nanodots prepared on Al2O3 substrate by magnetron sputtering.The results showed that the as-grown InN films exhibited uniform nanodot morphology and the size of the InN nano grains in...

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Bibliographic Details
Main Author: Zhang,Ziming (author)
Other Authors: Li,Jingjie (author), Zhou,Yijian (author), Fu,Hongyuan (author), Zhang,Zixu (author), Xiang,Guojiao (author), Zhao,Yang (author), Zhuang,Shiwei (author), Yang,Fan (author), Wang,Hui (author)
Format: article
Language:eng
Published: 2019
Subjects:
InN nanodots
magnetron sputtering
highly preferred orientation
electrical characteristic
Online Access:http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000600233
Country:Brazil
Oai:oai:scielo:S1516-14392019000600233

Internet

http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000600233

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