Combined in-depth X-ray Photoelectron Spectroscopy and Time-of-Flight Secondary Ion Mass Spectroscopy study of the effect of deposition pressure and substrate bias on the electrical properties and composition of Ga-doped ZnO thin films grown by magnetron
This work reports the effect of the applied substrate bias and deposition pressure on the bulk composition, electrical and microstructural properties of Gallium-doped Zinc Oxide thin films deposited by DC magnetron sputtering. In-depth Time-of-Flight Secondary Ion Mass Spectrometry and X-ray Photoel...
| Main Author: | |
|---|---|
| Other Authors: | , , , , , |
| Format: | article |
| Language: | eng |
| Published: |
2018
|
| Online Access: | https://hdl.handle.net/10216/116263 |
| Country: | Portugal |
| Oai: | oai:repositorio-aberto.up.pt:10216/116263 |