Analysis and characterization of thermal-piezoresistive MEMS resonators

Thermal-piezoresistive MEMS resonators based on internal thermal-piezoresistive amplification are a suitable alternative for sensing applications, since they enable high resonant frequencies and high-Q factors at ambient pressure. In this work, thermal-piezoresistive MEMS resonators are fabricated,...

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Bibliographic Details
Main Author: Coelho, Cláudia Alexandra Araújo (author)
Other Authors: Gaspar, J. (author), Rocha, Luís Alexandre Machado (author)
Format: conferencePaper
Language:eng
Published: 2016
Subjects:
Thermal-piezoresistive amplification
MEMS resonators
Science & Technology
Online Access:http://hdl.handle.net/1822/50704
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/50704

Internet

http://hdl.handle.net/1822/50704

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