Analysis and characterization of thermal-piezoresistive MEMS resonators
Thermal-piezoresistive MEMS resonators based on internal thermal-piezoresistive amplification are a suitable alternative for sensing applications, since they enable high resonant frequencies and high-Q factors at ambient pressure. In this work, thermal-piezoresistive MEMS resonators are fabricated,...
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| Outros Autores: | , |
| Formato: | conferencePaper |
| Idioma: | eng |
| Publicado em: |
2016
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/50704 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/50704 |