Evaluation of thermal properties of thin films by IR radiometry using a comprehensive set of Zr-O-N thin films
Modulated Infrared Radiometry is a photothermal technique which allows thermal characterization of coatings. Thermal properties are determined by applying the “Extremum Method”. Zr-O-N films were deposited by sputtering to evaluate their thermal properties and the sensitivity of the method and its s...
Main Author: | |
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Other Authors: | , , , |
Format: | article |
Language: | eng |
Published: |
2019
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Subjects: | |
Online Access: | http://hdl.handle.net/1822/62774 |
Country: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/62774 |