CMOS X-ray imager for dental radiography
This paper describes a 64 pixels X-ray imager architecture and fabrication process. The imager is composed by a 8×8 photodiodes array, fabricated in CMOS process, and an array of wells £lled with scintillating crystals. A thick-£lm of aluminum is etched in order to achieve square wells with 500 um d...
| Autor principal: | |
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| Outros Autores: | , , , |
| Formato: | conferencePaper |
| Idioma: | eng |
| Publicado em: |
2003
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/4286 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/4286 |