CMOS X-ray imager for dental radiography

This paper describes a 64 pixels X-ray imager architecture and fabrication process. The imager is composed by a 8×8 photodiodes array, fabricated in CMOS process, and an array of wells £lled with scintillating crystals. A thick-£lm of aluminum is etched in order to achieve square wells with 500 um d...

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Bibliographic Details
Main Author: Ramos, N. F. (author)
Other Authors: Rocha, J. G. (author), Lanceros-Méndez, S. (author), Wolffenbuttel, R. F. (author), Correia, J. H. (author)
Format: conferencePaper
Language:eng
Published: 2003
Subjects:
X-ray
Digital radiology
Scintillator
Etching
Online Access:http://hdl.handle.net/1822/4286
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/4286

Internet

http://hdl.handle.net/1822/4286

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