Cristea, D., Pătru, M., Crisan, A., Munteanu, D., Crăciun, D., Barradas, N. P., . . . Cunha, L. (2015). Composition and structure variation for magnetron sputtered tantalum oxynitride thin films, as function of deposition parameters.
Chicago Style (17th ed.) CitationCristea, D., et al. Composition and Structure Variation for Magnetron Sputtered Tantalum Oxynitride Thin Films, as Function of Deposition Parameters. 2015.
MLA (8th ed.) CitationCristea, D., et al. Composition and Structure Variation for Magnetron Sputtered Tantalum Oxynitride Thin Films, as Function of Deposition Parameters. 2015.
Warning: These citations may not always be 100% accurate.